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Kalamassery, Kochi, Ernakulam
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Electronics & Communication Engineering
ECT362 Introduction to MEMS
ECT362 Introduction to MEMS
Curriculum
5 Sections
27 Lessons
10 Weeks
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Module 1
5
1.1
MEMS and Microsystems
1.2
Applications
1.3
Principles and examples of Micro sensors and micro actuators
1.4
Micro accelerometer
1.5
Thermal sensors and actuators
Module 2
4
2.1
Review of Mechanical concepts
2.2
General stress strain relations
2.3
Longitudinal strain under pure bending
2.4
Spring constant of cantilever
Module 3
5
3.1
Scaling laws in miniaturization
3.2
Scaling in electrostatic and electromagnetic forces
3.3
Scaling in electricity and fluidic dynamics
3.4
Materials for MEMS
3.5
Polymers in MEMS
Module 4
10
4.1
Micro System fabrication – Photolithography
4.2
Ion implantation
4.3
Diffusion
4.4
Oxidation
4.5
Chemical vapour deposition
4.6
Etching
4.7
Overview of Micro manufacturing – Bulk micro manufacturing
4.8
Surface micro machining
4.9
LIGA process
4.10
Microstereo lithography
Module 5
3
5.1
Micro system Packaging
5.2
Bonding techniques for MEMS
5.3
Overview of MEMS areas
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